| 1. Identity statement | |
| Reference Type | Conference Paper (Conference Proceedings) |
| Site | mtc-m16.sid.inpe.br |
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Repository | sid.inpe.br/marciana/2004/01.13.16.32 |
| Last Update | 2004:03.29.03.00.00 (UTC) administrator |
| Metadata Repository | sid.inpe.br/marciana/2004/01.13.16.32.44 |
| Metadata Last Update | 2018:06.05.01.20.45 (UTC) administrator |
| Secondary Key | INPE-10399-PRE/5898 |
| Citation Key | BarretoVileGarg:2003:ThStRe |
| Title | Theoretical study of reaction BF3 + BF = BF2 + BF2  |
| Format | On-line |
| Year | 2003 |
| Access Date | 2024, May 14 |
| Secondary Type | PRE CI |
| Number of Files | 1 |
| Size | 844 KiB |
| 2. Context | |
| Author | 1 Barreto, Patrícia Regina Pereira 2 Vilela, Alessandra F. A. 3 Gargano, Ricardo |
| Resume Identifier | 1 8JMKD3MGP5W/3C9JJ2S |
| Group | 1 LAP-INPE-MCT-BR |
| Affiliation | 1 Plasma, Instituto Nacionalde Pesquisas Espaciais. Laboratório Associadode 2 Física, Universidade de Brasília. Instituto de |
| Conference Name | Latin American Workshop on Plasma Physics, 10; Brazilian Meeting on Plasma Physics, 7. |
| Conference Location | São Pedro |
| Date | 30 Nov. - 5 Dec. 2003 |
| Book Title | Proceedings |
| Tertiary Type | Posters |
| History (UTC) | 2018-06-05 01:20:45 :: administrator -> marciana :: 2003 |
| 3. Content and structure | |
| Is the master or a copy? | is the master |
| Content Stage | completed |
| Transferable | 1 |
| Content Type | External Contribution |
| Keywords | tecnologia de plasma plasma technology gas-phase kinetic mechanism |
| Abstract | A gas-phase kinetic mechanism for the Ar/B/F/N/H system was developed to describe the chemistry present during the growth of boron nitride films in a CVD reactor. The gas-phase mechanism, initially, includes 26 species and 67 elementary reactions, but this mechanism was extended to a mechanism with 35 species and 1012 reactions. Rate constants for 117 elementary reactions were obtained from published experimental/theoretical data and those for the other 895 reactions should be estimated using transition state theory(TST). We developed a simple program to determine the reaction rate by using conventional transition state theory and also the thermodynamic properties of the species. The program prints out the reaction rate in the Arrhenius form (k = A Tn exp(-Ea/RT)) over the temperature range of 200 – 4000K and also, if it is desirable, the thermodynamic properties (heat capacity, entropy and enthalpy) in the polynomial form for 200-6000K temperature range. The reaction rate and the polynomial form for the thermodynamic properties is used in the kinetic program as ChemKin to simulated the gas phase composition during the growth of boron nitride in a plasma torch experiment. The theoretical data is used to optimize the experimental conditions because films properties depend on complex interactions involving heat and mass transport and chemical kinetics. |
| Area | FISPLASMA |
| Arrangement | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAP > Theoretical study of... |
| doc Directory Content | access |
| source Directory Content | there are no files |
| agreement Directory Content | there are no files |
| 4. Conditions of access and use | |
| data URL | http://urlib.net/ibi/sid.inpe.br/marciana/2004/01.13.16.32 |
| zipped data URL | http://urlib.net/zip/sid.inpe.br/marciana/2004/01.13.16.32 |
| Language | en |
| Target File | PRPBarreto_Poster_LAWPP2003.pdf |
| User Group | administrator |
| Visibility | shown |
| Copy Holder | SID/SCD |
| 5. Allied materials | |
| Next Higher Units | 8JMKD3MGPCW/3ET2RFS |
| Citing Item List | sid.inpe.br/mtc-m21/2012/07.13.14.57.42 1 |
| Host Collection | sid.inpe.br/banon/2003/08.15.17.40 |
| 6. Notes | |
| Empty Fields | archivingpolicy archivist callnumber copyright creatorhistory descriptionlevel dissemination documentstage doi e-mailaddress edition editor electronicmailaddress identifier isbn issn label lineage mark mirrorrepository nextedition notes numberofvolumes orcid organization pages parameterlist parentrepositories previousedition previouslowerunit progress project publisher publisheraddress readergroup readpermission rightsholder schedulinginformation secondarydate secondarymark serieseditor session shorttitle sponsor subject tertiarymark type url versiontype volume |
| 7. Description control | |
| e-Mail (login) | marciana |
| update | |